Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-24T15:09:58.307Z Has data issue: false hasContentIssue false
  • English
  • Français

Electron Beam-Induced Chemical Reactions Of Single Crystal Calcium Floride By Time - Resolved EELS

Published online by Cambridge University Press:  02 July 2020

Y. Murooka ,
N. Tanaka  and
M. Hibino
Y. Murooka
Affiliation:
Dept. of Electronics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603Japan
N. Tanaka
Affiliation:
Dept. of Applied Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603Japan
M. Hibino
Affiliation:
CIRSE, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603Japan
Get access

Extract

Using parallel beam illumination, electron beam-induced structural transformation has been studied as radiation damages for decades. Recently, however, more attention may need to be paid to beam-induced chemical transformation which happens under illumination by a finely focused beam. Such a small probe is often used in analytical electron microscopy, particularly the core-electron energy loss spectroscopy (EELS). Since the signal for the spectroscopy is very weak long radiation is required and makes the induced chemical reactions happen. Therefore, without attentions to the reactions, the acquired data could lead to misinterpretation of specimen properties. In the present study, using a single crystal calcium fluoride (CaF2), we demonstrated by time-resolved EELS that radiation with a nanometer electron probe could induce chemical reactions between the specimen and the typical residual gases in a microscope column.

The thin films of CaF2 were fabricated by vaporizing flakes of single crystal CaF2 with an electron beam and by dissolving the vapors onto a (001) surface of sodium chloride (NaCl) heated at 300°C.

Type
The Theory and Practice of Scanning Transmission Electron Microscopy
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 144 - 145
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1Murooka, Y. et al: Inst. Phys. Conf. 138 (1993) 71.Google Scholar