Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-29T23:43:10.021Z Has data issue: false hasContentIssue false
  • English
  • Français

Electron Beam-Induced Charging and Modifications of Thin Films

Published online by Cambridge University Press:  23 September 2015

Marek Malac ,
Marco Beleggia ,
Teddy Rowan ,
Ray Egerton ,
Masahiro Kawasaki ,
Yoshio Okura  and
Robert A. McLeod
Marek Malac
Affiliation:
National Institute of Nanotechnology, 11421 Saskatchewan Drive, Edmonton, Canada Department of Physics, University of Alberta, T6G 2E1, Edmonton, Canada
Marco Beleggia
Affiliation:
Centre of Electron Nanoscopy, Denmark Technical University, Denmark Helmholtz-Zentrum Berlin fuer Materialen und Energie, 14109 Berlin, Germany
Teddy Rowan
Affiliation:
National Institute of Nanotechnology, 11421 Saskatchewan Drive, Edmonton, Canada University of British Columbia. 2329 West Mall, Vancouver, V6T 1Z4, Canada
Ray Egerton
Affiliation:
National Institute of Nanotechnology, 11421 Saskatchewan Drive, Edmonton, Canada Department of Physics, University of Alberta, T6G 2E1, Edmonton, Canada
Masahiro Kawasaki
Affiliation:
JEOL Ltd. 1-2 Musashino 3 chome, Akishima, Tokyo 198-8558, Japan
Yoshio Okura
Affiliation:
JEOL Ltd. 1-2 Musashino 3 chome, Akishima, Tokyo 198-8558, Japan
Robert A. McLeod
Affiliation:
Fondation Nanosciences, 23 rue des Martyrs, 38000 Grenoble, France

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1385 - 1388
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Reimer, L., Scanning Electron Microscopy, 2nd ed., Springer, 1998.Google Scholar
[2] Egerton, RF & Malac, M, Microscopy and Microanalysis 10(S02 (2004). p 1382.CrossRefGoogle Scholar
[3] Malac, M., et. al., Ultramicroscopy 118 (2012). p 77.Google Scholar
[4] Danev, R., et. al., PNAS 111 (2015). p 15635.Google Scholar
[5] Berriman, J. & Leonard, K. L., Ultramicroscopy 19 (1986). p 349.Google Scholar
[6] Support of NINT, NSERC, JEOL USA Inc. and JEOL Ltd. is gratefully acknowledged.Google Scholar