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Electron Beam Induced Processing: Experimentation, Simulation, and Applications

Published online by Cambridge University Press:  03 August 2008

JD Fowlkes ,
DA Smith  and
PD Rack
JD Fowlkes
Affiliation:
Oak Ridge National Laboratory
DA Smith
Affiliation:
The University of Tennessee, Knoxville
PD Rack
Affiliation:
Oak Ridge National Laboratory
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1196 - 1197
Copyright
© 2008 Microscopy Society of America

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