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Electron Beam Induced Depositions of Nano-dots by the Presence of the Partial Pressure of Precursor

Published online by Cambridge University Press:  01 August 2004

Kazuo Furuya ,
Miyoko Tanaka ,
M Shimojo  and
Kazutaka Mitsuishi
Kazuo Furuya
Affiliation:
National Institute for Materials Science, Tsukuba, Japan
Miyoko Tanaka
Affiliation:
National Institute for Materials Science, Tsukuba, Japan
M Shimojo
Affiliation:
National Institute for Materials Science, Tsukuba, Japan
Kazutaka Mitsuishi
Affiliation:
National Institute for Materials Science, Tsukuba, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 540 - 541
Copyright
© 2004 Microscopy Society of America

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