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Electron Beam Aberration Correction Using Optical Fields

Published online by Cambridge University Press:  30 July 2020

Andrea Konecna  and
F. Javier Garcia de Abajo
Andrea Konecna
Affiliation:
ICFO - The Institute of Photonic Sciences, Castelldefels, Catalonia, Spain
F. Javier Garcia de Abajo
Affiliation:
ICFO - The Institute of Photonic Sciences, Castelldefels, Catalonia, Spain

Abstract

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Type
Pushing the Limits of Detection in Quantitative (S)TEM Imaging, EELS, and EDX
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2974
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Copyright
Copyright © Microscopy Society of America 2020

References

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[5] Supported by ERC (Advanced Grant 789104-eNANO), the Spanish MINECO (MAT2017-88492-R and SEV2015- 0522), the Catalan CERCA Program, and Fundació Privada Cellex.Google Scholar