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Electrical Probing and Current Imaging for Failure Analysis in the SEM/FIB

Published online by Cambridge University Press:  23 September 2015

Stephan Kleindiek ,
Andreas Rummel ,
Klaus Schock ,
Gregor Renka  and
Matthias Kemmler
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Gregor Renka
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 169 - 170
Copyright
Copyright © Microscopy Society of America 2015