Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-12-01T01:16:46.953Z Has data issue: false hasContentIssue false
  • English
  • Français

Electrical Isolation Preserved by Plasma Focused Ion Beam TEM Sample Preparation and Verified with STEM SEEBIC Imaging

Published online by Cambridge University Press:  30 July 2020

Matthew Mecklenburg ,
Fred Shaapur ,
William Hubbard ,
Brian Zutter  and
B. C. Regan
Matthew Mecklenburg
Affiliation:
University of Southern California, Los Angeles, California, United States
Fred Shaapur
Affiliation:
FabMetrix, Inc., Scottsdale, Arizona, United States
William Hubbard
Affiliation:
NanoElectroning Imaging, Inc. (NEI), Los Angeles, California, United States
Brian Zutter
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States
B. C. Regan
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 194 - 195
Check for updates
Copyright
Copyright © Microscopy Society of America 2020

References

Mayer, J et al. , MRS BULLETIN 32 (2007), p. 400.10.1557/mrs2007.63CrossRefGoogle Scholar
Hubbard, WA et al. , Physical Review Applied 10 (2018), p. 044066.10.1103/PhysRevApplied.10.044066CrossRefGoogle Scholar
Hubbard, W A et al. , Applied Physics Letters 115 (2019), p. 133502.10.1063/1.5117055CrossRefGoogle Scholar
Mecklenburg, M et al. , Microscopy and Microanalysis 25 (S2) (2019), p. 2354-2355.10.1017/S1431927619012509CrossRefGoogle Scholar
Mecklenburg, M et al. , Ultramicroscopy 207 (2019 ), p. 112852.10.1016/j.ultramic.2019.112852CrossRefGoogle Scholar
Mecklenburg, M et al. , Microscopy and Microanalysis 19 (S2) (2013 ), p. 458-459.10.1017/S1431927613004285CrossRefGoogle Scholar
Data presented here were acquired at the Core Center of Excellence in Nano Imaging (CNI) at the University of Southern California. This work was supported by NSF STC award DMR-1548924 (STROBE), by NSF award DMR-1611036, and by the UCLA PSEIF.Google Scholar