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EFTEM Contrast Tuning and EELS Fine Structure Analysis for Characterization of Carbon Containing Ultra-Low-k Dielectric Materials

Published online by Cambridge University Press:  23 September 2015

Brenda Prenitzer ,
Stephen Schwarz ,
Brian Kempshall  and
Imen Rezadad
Brenda Prenitzer
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA
Stephen Schwarz
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA
Brian Kempshall
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA
Imen Rezadad
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA Physics Department, University of Central Florida, Orlando, Florida, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 831 - 832
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Chen, Sheng-Wen, et al., Materials 5 (2012) 377–384.CrossRefGoogle Scholar
[2] Howe, James M., et al., Journal of Electron Microscopy 53(4 (2004) 339–351.CrossRefGoogle Scholar