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Effective New Plasma Cleaning Strategies for Scanning Electron Microscopes and FIBs

Published online by Cambridge University Press:  23 September 2015

Ronald Vane  and
Michael Cable
Ronald Vane
Affiliation:
XEI Scientific, Redwood City, CA 94063
Michael Cable
Affiliation:
XEI Scientific, Redwood City, CA 94063

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 161 - 162
Copyright
Copyright © Microscopy Society of America 2015 

References

1. Morgan, C.A. & Vane, R. “Carbon Contamination removal in larger chambers with low-power plasma cleaning” Proceedings of SPIE, vol 8324, 9 March 2012\, pages 83242F-83242F-8, XP055160546, ISSN: 0277-786X, DOI: 10.1117/12.917786.CrossRefGoogle Scholar
2. Vane, Ronald, et al. “Advancements in Decontamination of Vacuum Systems Using Plasma Cleaning” Micrcoscopy and Microanalysis 2104 poster 566.Google Scholar