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The effect of residual lens aberrations on the determination of column positions around partial dislocations in GaAs

Published online by Cambridge University Press:  22 July 2003

X. Xu
Affiliation:
Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472 National Center for Electron Microscopy, Lawrence Berkeley national Laboratory, Berkeley, CA 9472
S.P. Beckman
Affiliation:
Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472 Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 9472
P. Specht
Affiliation:
Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472
D.C. Chrzan
Affiliation:
Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472 Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 9472
E.R. Weber
Affiliation:
Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472 Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 9472
C. Kisielowski
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley national Laboratory, Berkeley, CA 9472

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2003