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EDS Windows and Plasma Cleaning: Characterization and Damage Mechanisms

Published online by Cambridge University Press:  25 July 2016

Jens Rafaelsen
Jens Rafaelsen*
Affiliation:
EDAX Inc, A division of Ametek, Materials Analysis Division, 91 McKee Drive, Mahwah, NJ

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 638 - 639
Copyright
© Microscopy Society of America 2016 

References

[1] Improved Carbon Analysis with Evactron Plasma Cleaning. Rolland, P., Carlino, V. and Vane, R. . S02, s.l. : Microscopy Society of America, 2004, Microscopy and Microanalysis, Vol. 10, pp. 964-965x.CrossRefGoogle Scholar
[2] Törmä, P. T., et al, IEEE TRANSACTIONS ON NUCLEAR SCIENCE 61 (2014). pp. 695–699.Google Scholar
[3] Chantler, C.T., et al., "X-Ray Form Factor, Attenuation and Scattering Tables (version 2.1).". National Institute of Standards and Technology (NIST). Retrieved February 2016.Google Scholar
[4] Drouin, D., et al, SCANNING VOL. 29, 92–101, 2007.CrossRefGoogle Scholar