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E-beam-Deposited Tungsten Contacts for Carbon Nanofiber Interconnect Test Devices

Published online by Cambridge University Press:  08 April 2017

N Kanzaki ,
S Maeda ,
P Wilhite ,
T Yamada ,
T Saito  and
C Yang
N Kanzaki
Affiliation:
Center for Nanostructures, Santa Clara University
S Maeda
Affiliation:
Center for Nanostructures, Santa Clara University
P Wilhite
Affiliation:
Center for Nanostructures, Santa Clara University
T Yamada
Affiliation:
Center for Nanostructures, Santa Clara University
T Saito
Affiliation:
Hitachi High-Technologies
C Yang
Affiliation:
Center for Nanostructures, Santa Clara University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1518 - 1519
Copyright
Copyright © Microscopy Society of America 2011