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Dynamic Correction of Higher-Order Deflection Aberrations in the Environmental SEM

Published online by Cambridge University Press:  28 September 2015

Martin Oral ,
Vilém Neděla  and
Gerasimos D. Danilatos
Martin Oral
Affiliation:
Institute of Scientific Instruments, AS CR, Královopolská 147, 612 64 Brno, Czech Republic
Vilém Neděla
Affiliation:
Institute of Scientific Instruments, AS CR, Královopolská 147, 612 64 Brno, Czech Republic
Gerasimos D. Danilatos
Affiliation:
ESEM Research Laboratory, 28 Wallis Parade, North Bondi, NSW 2026, Australia

Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 194 - 199
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Hawkes, PW & Kasper, E in Principles of Electron Optics. Academic Press), (1994.Google Scholar
[2]Goto, E & Soma, T, Optik 48 (1977). p. 255.Google Scholar
[3]Lencovä, B, Optik 58 (1981). p. 25.Google Scholar
[4]Danilatos, G D, US patent No. 6809322 B2 (2004). also known as US 20030168595 A1.Google Scholar
[5]Danilatos, GD, Rattenberger, J & Dracopoulos, V, J. Microsc. 242 (2011). p. 166.CrossRefGoogle Scholar
[6]Zhu, X, Liu, H & Munro, E, Proc. SPIE 2522 (1995). p. 66.CrossRefGoogle Scholar
[7]Zhu, X, et al, Proc. SPIE 3155 (1997). p. 47.CrossRefGoogle Scholar
[8]Munro, E, Optik 39 (1974). p. 450.Google Scholar
[9]Wang, LP, et al, Optik 113 (2002). p. 181.CrossRefGoogle Scholar
[10]Kangyan, H & Tang, TT, Optik 110 (1999). p. 9.Google Scholar
[11]Oral, M & Lencovä, B, Ultramicroscopy 109 (2009). p. 1365, ..CrossRefGoogle Scholar
[12]Lencovä, B & Zlämal, J, Phys. Procedia 1 (2008). p. 315.CrossRefGoogle Scholar
[13] Supported by the Grant Agency of the Czech Republic, Project No. GA14-22777S and by Ministry of Education, Youth and Sports of the Czech Republic (LO1212)..Google Scholar