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Dual Lens Electron Holography for High Spatial Resolution Junction and Strain Mapping of Semiconductor Devices

Published online by Cambridge University Press:  27 August 2014

Y.Y. Wang  and
J. Bruley
J. Bruley
Affiliation:
IBM, Zip 40E, Hudson Valley Research Park, 2070 Route 52, Hopewell Jct., NY 12533, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 240 - 241
Copyright
Copyright © Microscopy Society of America 2014 

References

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