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Drift-Corrected High Magnification Elemental X-Ray Mappng

Published online by Cambridge University Press:  02 July 2020

M. Kawasaki ,
F. Hosokawa ,
G. Fritz  and
N. Kale
M. Kawasaki
Affiliation:
JEOL ltd., 3-1-2 Musashino Akishima, Tokyo196-8558, JAPAN
F. Hosokawa
Affiliation:
JEOL ltd., 3-1-2 Musashino Akishima, Tokyo196-8558, JAPAN
G. Fritz
Affiliation:
NORAN Instruments Inc, 2551 West Beltline Highway Middleton, WI53562
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Extract

Chemical analysis in a TEM has usually been done as a manual point analysis by forming a probe of an appropriate size for the area of interest. This type of local analysis may provide enough information from the selected area, but these days when materials properties are found to be deeply dependent on chemical distribution, one needs to do a higher dimensional analysis using a systematic line scan or mapping.

Since the advent of the Field Emission Gun (FEG), chemical mapping using X-rays (EDS mapping) or inelastic scattered electrons (Energy Filtering mapping) has become more and more commonly used due to the extremely high resolution information available in the chemical map. Compared to the energy filtered mapping, EDS maps take longer to acquire due to the use of the scanned probe over the area but EDS mapping allows a wider choice of elements to map due to the wider energy range it covers.

Type
Ceramics & Minerals
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 418 - 419
Copyright
Copyright © Microscopy Society of America

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References

1)Aoshima, K. et al.: J. Appl Phys 85, 8, 5042 (1999)CrossRefGoogle Scholar
1)Kawasaki, M. et al.: J. Electron Microsc. 47, 335 (1998)CrossRefGoogle Scholar
2)Kawasaki, M. et al.: J. Electron Microsc. 47, 477 (1998)CrossRefGoogle Scholar