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Direct-write Focused Ion Beam Lithography

Published online by Cambridge University Press:  01 August 2010

A Joshi-Imre ,
L Ocola  and
J Klingfus
A Joshi-Imre
Affiliation:
Argonne National Laboratory
L Ocola
Affiliation:
Argonne National Laboratory
J Klingfus
Affiliation:
Raith USA

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 194 - 195
Copyright
Copyright © Microscopy Society of America 2010