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Direct Visualization of Solution-based Nanofabrication Processes with In Situ TEM: Chemical Wet-etching and Solution-based Cleaning/Drying of High-Aspect-Ratio Nanostructures

Published online by Cambridge University Press:  01 August 2018

Utkur Mirsaidov ,
Zainul Aabdin ,
Tanmay Ghosh ,
Utkarsh Anand ,
Nandi Vrancken ,
Xiu Mei Xu ,
See Wee Chee ,
Zhaslan Baraissov  and
Frank Holsteyns
Utkur Mirsaidov
Affiliation:
Center for Advanced 2D Materials and Department of Physics, National University of Singapore, 117546, Singapore Center for Biolmaging Sciences and Department of Biological Sciences, National University of Singapore, 117557, Singapore Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore
Zainul Aabdin
Affiliation:
Center for Advanced 2D Materials and Department of Physics, National University of Singapore, 117546, Singapore Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), Singapore138634, Singapore
Tanmay Ghosh
Affiliation:
Center for Advanced 2D Materials and Department of Physics, National University of Singapore, 117546, Singapore Center for Biolmaging Sciences and Department of Biological Sciences, National University of Singapore, 117557, Singapore
Utkarsh Anand
Affiliation:
Center for Advanced 2D Materials and Department of Physics, National University of Singapore, 117546, Singapore Center for Biolmaging Sciences and Department of Biological Sciences, National University of Singapore, 117557, Singapore
Nandi Vrancken
Affiliation:
imec, Kapeldreef 75, Leuven, B-3001, Belgium
Xiu Mei Xu
Affiliation:
imec, Kapeldreef 75, Leuven, B-3001, Belgium
See Wee Chee
Affiliation:
Center for Advanced 2D Materials and Department of Physics, National University of Singapore, 117546, Singapore Center for Biolmaging Sciences and Department of Biological Sciences, National University of Singapore, 117557, Singapore
Zhaslan Baraissov
Affiliation:
Center for Advanced 2D Materials and Department of Physics, National University of Singapore, 117546, Singapore Center for Biolmaging Sciences and Department of Biological Sciences, National University of Singapore, 117557, Singapore
Frank Holsteyns
Affiliation:
imec, Kapeldreef 75, Leuven, B-3001, Belgium

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 276 - 277
Copyright
© Microscopy Society of America 2018 

References

[1] Thelander, C., et al, Mater. Today 9 2006 28–35.Google Scholar
[2] Williamson, M. J., et al, Nature Materials 2 2003) p. 532.Google Scholar
[3] Zheng, H., et al, Science 324 2009) p. 1309.Google Scholar
[4] Mirsaidov, U., et al, Proc. Natl. Acad. Sci. U.S.A. 109 2012) p. 7187.Google Scholar
[5] Aabdin, Z., et al, Nano Letters 17 2017) p. 2953.Google Scholar
[6] This work was supported by Singapore National Research (NRF-CRP16-2015-05).Google Scholar