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Direct 3D (S)TEM Observation at Specific-site and High Resolution Using a FIB Micro-sampling Technique

Published online by Cambridge University Press:  01 August 2004

Toshie Yaguchi ,
Mitsuru Konno ,
Takeo Kamino ,
Takahito Hashimoto ,
Tsuyoshi Ohnishi  and
Kaoru Umemura
Toshie Yaguchi
Affiliation:
Hitachi Science Systems, Ibaraki, Japan
Mitsuru Konno
Affiliation:
Hitachi Science Systems, Ibaraki, Japan
Takeo Kamino
Affiliation:
Hitachi Science Systems, Ibaraki, Japan
Takahito Hashimoto
Affiliation:
Hitachi High-Technologies, Ibaraki, Japan
Tsuyoshi Ohnishi
Affiliation:
Hitachi High-Technologies, Ibaraki, Japan
Kaoru Umemura
Affiliation:
Hitachi High-Technologies, Ibaraki, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1164 - 1165
Copyright
© 2004 Microscopy Society of America

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