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Development of Ultra-thin TEM Lamella Preparation Technique and Its Application in Failure Analysis

Published online by Cambridge University Press:  30 July 2020

Yu Zhang ,
Brian Popielarski ,
Kevin Davidson ,
Long Men ,
Wayne Zhao  and
Frieder Baumann
Yu Zhang
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Brian Popielarski
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Kevin Davidson
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Long Men
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Wayne Zhao
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Frieder Baumann
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1400 - 1402
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Copyright
Copyright © Microscopy Society of America 2020

References

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