Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-25T03:38:34.380Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of in situ Imaging Capabilities in SEM and Their Applications

Published online by Cambridge University Press:  05 August 2019

Y Hashimoto ,
A Muto ,
K Shigeto ,
H Ito ,
H Itabashi ,
M Ohno ,
T Saito  and
S Tachibana
Y Hashimoto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan.
A Muto
Affiliation:
Nanotechnology System Division, Hitachi High Technologies America, Inc., MD, USA.
K Shigeto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan.
H Ito
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan.
H Itabashi
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan.
M Ohno
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan.
T Saito
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan.
S Tachibana
Affiliation:
Marketing Dept., Hitachi High-Technologies Corporation, Tokyo, Japan.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 564 - 565
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Kubo, M et al. , ISIJ Int. 56 (4) (2016), p. 669.Google Scholar