Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-25T14:53:43.998Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of Electron Optics System for "ETHOS" High-Performance FIB-SEM

Published online by Cambridge University Press:  01 August 2018

Shunsuke Sato ,
Chisato Kamiya ,
Ryo Hirano ,
Tsunenori Nomaguchi ,
Akinari Morikawa ,
Hiroyuki Suzuki ,
Hidekazu Suzuki  and
Yo Yamamoto
Shunsuke Sato
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Chisato Kamiya
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Ryo Hirano
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Tsunenori Nomaguchi
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Akinari Morikawa
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Hiroyuki Suzuki
Affiliation:
Beam Technology Engineering Dep., Hitachi High-Technology Science corp., Oyama-cho, Japan.
Hidekazu Suzuki
Affiliation:
Beam Technology Engineering Dep., Hitachi High-Technology Science corp., Oyama-cho, Japan.
Yo Yamamoto
Affiliation:
Beam Technology Engineering Dep., Hitachi High-Technology Science corp., Oyama-cho, Japan.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 836 - 837
Copyright
© Microscopy Society of America 2018