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Development of C/SiN Hybrid Sealing-Film for Environmental-Cell Window

Published online by Cambridge University Press:  08 April 2017

T Kawasaki ,
T Miura ,
Z Cui ,
H Tsutsui ,
H Matsutani  and
T Tanji
T Kawasaki
Affiliation:
Nagoya University
T Miura
Affiliation:
Nagoya University
Z Cui
Affiliation:
Nagoya University
H Tsutsui
Affiliation:
Kinki University
H Matsutani
Affiliation:
Kinki University
T Tanji
Affiliation:
Nagoya University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 534 - 535
Copyright
Copyright © Microscopy Society of America 2011