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Development of a Simulation Tool for “Real World” SEM Applications

Published online by Cambridge University Press:  01 August 2002

D. Drouin  and
A.R. Couture
D. Drouin
Affiliation:
Départmenet de génie électrique et génie informatique, Université de Sherbrooke, Sherbrooke, Québec, J1K 2R1, Canada
A.R. Couture
Affiliation:
Départmenet de génie électrique et génie informatique, Université de Sherbrooke, Sherbrooke, Québec, J1K 2R1, Canada

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 702 - 703
Copyright
Copyright © Microscopy Society of America 2002