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Development of a Real-Time Elemental Mapping System in a Scanning Transmission Electron Microscope

Published online by Cambridge University Press:  02 July 2020

K. Kaji Ueda ,
T. Aoyama ,
S. Taya ,
H. Tanaka  and
S. Isakozawa
K. Kaji Ueda
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan
T. Aoyama
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan
S. Taya
Affiliation:
Instruments Group, Hitachi Ltd., Hitachinaka, Ibaraki, 312-8504Japan
H. Tanaka
Affiliation:
Instruments Group, Hitachi Ltd., Hitachinaka, Ibaraki, 312-8504Japan
S. Isakozawa
Affiliation:
Instruments Group, Hitachi Ltd., Hitachinaka, Ibaraki, 312-8504Japan
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The ability to obtain elemental maps in a transmission electron microscope (TEM) or scanning transmission electron microscope (STEM) is extremely useful in the analysis of materials, and semiconductor devices such as ULSI's and GMR heads. Hitachi has developed a new type of elemental mapping system, consisting of a STEM (Hitachi, HD-2000) equipped with a two-window electron energy filter. In-situ calculation of the energy-filtered signal makes it possible to observe real time elemental mapping images with nanometer resolution.

Figure 1 shows a schematic of the elemental mapping system. In the STEM, electrons are generated from a cold field emission gun and accelerated to a potential of 200 kV. The electrons arc focused by the objective lens into a small probe (<1 nm), which is then rastered over the specimen using scanning coils. Transmitted electrons are collected by an energy filter, which is located beneath the specimen., and consists of quadrupole lenses, a magnetic prism spectrometer and two kinds of electron beam energy detectors.

Type
Electron Energy-Loss Spectroscopy (EELS) and Imaging
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 178 - 179
Copyright
Copyright © Microscopy Society of America

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