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Detector Solid Angle Formulas for Use in X-Ray Energy Dispersive Spectrometry

Published online by Cambridge University Press:  16 March 2009

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Argonne National Laboratory, Electron Microscopy Center, Materials Science Division Bldg. 212, 9700 S. Cass Ave., Argonne, IL 60439
*
E-mail: [email protected]
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Abstract

With the advent of silicon drift X-ray detectors, a range of new geometries has become possible in electron optical columns. Because of their compact size, these detectors can potentially achieve high geometrical collection efficiencies; however, using traditional approximations detector solid angle calculations rapidly break down and at times can yield nonphysical values. In this article we present generalized formulas that can be used to calculate the variation in detection solid angle for contemporary Si(Li) as well as new silicon drift configurations.

Keywords

solid angleSDDSi(Li)X-ray detectorsEDSXEDScollection efficiency
Type
Microanalysis
Information
Microscopy and Microanalysis , Volume 15 , Issue 2 , April 2009 , pp. 93 - 98
Copyright
Copyright © Microscopy Society of America 2009

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References

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