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Detectability & Sensitivity vs Incident Beam Energy in Modern Analytical Electron Microscopes

Published online by Cambridge University Press:  22 July 2022

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Photon Sciences Directorate, Argonne National Laboratory, Lemont, Il, USA
*
*Corresponding author: [email protected]

Abstract

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Type
Science of Metrology with Electrons
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 784 - 786
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Copyright
Copyright © Microscopy Society of America 2022

References

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Acknowledgements; This work was supported by the Photon Science Directorate and Laboratory Directed Research and Development (LDRD) funding from Argonne National Laboratory, provided by the Director, as well as the Office of Science, of the U.S. Department of Energy under Contract No. DE-AC02-06CH11357.Google Scholar