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Design and Performance of the Sesame I

Published online by Cambridge University Press:  02 July 2020

D. Krahl ,
S. Kujawa ,
A. Rilk ,
G. Benner ,
P. Hahn ,
G. Lang ,
E. Essers  and
W. Probst
D. Krahl
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
S. Kujawa
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
A. Rilk
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
G. Benner
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
P. Hahn
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
G. Lang
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
E. Essers
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
W. Probst
Affiliation:
LEO Elektronenmikroskopie GmbH, Carl-Zeiss-Str. 56, 73447Oberkochen, Germany
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Abstract

The strong technological trend towards higher and higher integrated systems is resulting in considerably increasing demands on nanotechnique and -electronics. One of the most important sets of information is the characterization of the inner interfaces within such materials not only concerning the atomic structure but also concerning chemical composition and bonding and concerning local strain. New generation energy filtering TEMs using corrected in-column spectrometers and providing considerably increased power of resolution concerning imaging and analysis are thus essential in order to be able to understand, define, built and characterize such devices.

Within the SESAMe (Sub-eV-sub-Angstrom Microscope) [1] project, LEO and CEOS realize such a microscope for the MPI of Metal Research, Stuttgart in 3 steps. For step 1 and 2 an in second order completely corrected and in third order minimized 90° OMEGA energy filter has been developed. This filter is operating since one year in a 200 kV LEO EFTEM with LaB6 emitter (Step 1) [4]. Results will be presented by W. Sigle during this meeting. This filter will also be incorporated in the Sub-Angstrom-TEM (SATEM) with Cs corrector for the Research Center Jülich.

Type
TEM Instrument Development (Organized by D. Smith and L. Allard)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 924 - 925
Copyright
Copyright © Microscopy Society of America 2001

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References

references

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