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Damage Caused by Transverse Scattering of Gallium during FIB Milling

Published online by Cambridge University Press:  01 August 2004

Kil-Soo Ko ,
Won-Chae Jung ,
Jayhoon Chung  and
Lew Rabenberg
Kil-Soo Ko
Affiliation:
Texas Instruments, Texas
Won-Chae Jung
Affiliation:
University of Texas at Austin
Jayhoon Chung
Affiliation:
Kyonggi University, Suwon, South Korea
Lew Rabenberg
Affiliation:
Kyonggi University, Suwon, South Korea
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1170 - 1171
Copyright
© 2004 Microscopy Society of America

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