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Custom Scan Control and Time Resolved Signal Acquisition for High Resolution SEM Imaging

Published online by Cambridge University Press:  01 August 2018

William C. Lenthe ,
Jean-Charles Stinville ,
McLean P. Echlin ,
Zhe Chen ,
Samantha Daly ,
Tresa M. Pollock  and
Marc De Graef
William C. Lenthe
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Jean-Charles Stinville
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
McLean P. Echlin
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
Zhe Chen
Affiliation:
Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Samantha Daly
Affiliation:
Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Tresa M. Pollock
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
Marc De Graef
Affiliation:
Dept. of Materials Science and Engineering, Carnegie Mellon Univ., Pittsburgh, PA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 536 - 537
Copyright
© Microscopy Society of America 2018 

References

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[9] The authors acknowledge ONR Vannevar Bush Faculty Fellowship support (N00014-16-1-2821) as well as ONR grant N00014-16-1-2982 and an AFRL/AFOSR Center of Excellence Grant (FA9550-12- 1-0445). This work was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Award #DESC0008637 as part of the Center for PRedictive Integrated Structural Materials Science (PRISMS) at the University of Michigan.Google Scholar