Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-12-01T03:10:32.738Z Has data issue: false hasContentIssue false
  • English
  • Français

Crystallization Processes of Amorphous GeSn Thin Films by Heat Treatment and Electron Beam Irradiation

Published online by Cambridge University Press:  04 August 2017

T. Kimura ,
M. Ishimaru ,
M. Okugawa ,
R. Nakamura  and
H. Yasuda
T. Kimura
Affiliation:
Department of Materials Science and Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka 804-8550, Japan
M. Ishimaru
Affiliation:
Department of Materials Science and Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka 804-8550, Japan
M. Okugawa
Affiliation:
Department of Materials Science, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
R. Nakamura
Affiliation:
Department of Materials Science, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
H. Yasuda
Affiliation:
Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Ibaraki, Osaka 567-0047, Japan

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 2046 - 2047
Copyright
© Microscopy Society of America 2017 

References

[1] Zaima, S., etal, Sci. Technol. Adv. Mater 16 2015 043502.CrossRefGoogle Scholar
[2] Toko, K., et al, Appl. Phys. Lett 106 2015 082109.CrossRefGoogle Scholar
[3] Lee, J.-G. & Mori, H. Thin Solid Films 546 2013 453.CrossRefGoogle Scholar
[4] Jencic, I., Robertson, I.M. & Skvarc, J. Nucl. Instr. Meth. Phys. Res. B 148 1999 345.CrossRefGoogle Scholar