Cross-Sectioning of Plan-View Samples and Artifacts of TEM Sample Preparation

M V Sidorov

doi:10.1017/S1431927605504367

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Cross-Sectioning of Plan-View Samples and Artifacts of TEM Sample Preparation

Published online by Cambridge University Press: 01 August 2005

M V Sidorov

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M V Sidorov: Affiliation:
Spansion/AMD

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type: Research Article
Information: Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 842 - 843

DOI: https://doi.org/10.1017/S1431927605504367 [Opens in a new window]
Copyright: © 2005 Microscopy Society of America

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Cross-Sectioning of Plan-View Samples and Artifacts of TEM Sample Preparation

Volume 11, Issue S02
M V Sidorov ^(a1)
DOI: https://doi.org/10.1017/S1431927605504367

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Cross-Sectioning of Plan-View Samples and Artifacts of TEM Sample Preparation

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