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Correction of Spherical Aberration in a Focused Ion Beam System by Means of Space Charge

Published online by Cambridge University Press:  01 August 2004

Jon Orloff
Jon Orloff
Affiliation:
University of Maryland, College Park
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Extract

Extended abstract of a paper presented at the Pre-Meeting Congress: Materials Research in an Aberration-Free Environment, at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, July 31 and August 1, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S03 , August 2004 , pp. 26 - 27
Copyright
© 2004 Microscopy Society of America

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