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A Copper Leadframe Oxidation Investigation by Electron Energy-Loss Spectroscopy

Published online by Cambridge University Press:  02 July 2020

A. Rucki
Affiliation:
Siemens AG, Corporate Technology, Otto-Hahn-Ring 6, D-81730, Miinchen, Germany
C. Lee
Affiliation:
Infineon Technologies Asia Pacific Pte Ltd, Assembly & Interconnect Technology, Package Definition (AIT SIN PD), 168 Kallang Way, Singapore349253
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Extract

Copper alloys are widely used as a leadframe (chip carrier) material in plastic packaged semiconductor devices. The oxidation of Cu leadframes during the assembly process can result in poor adhesion between the moulding compound and the die-pad. This often leads to interfacial delamination and contributes to popcorn cracking during the component-board attachment process. The main cause of poor adhesion has been attributed to the weak Cu oxide(s) layer on the leadframe surface. Studies have shown that the moulding compound/leadframe adhesion decreases with increasing oxide thickness.

The aim of this investigation is to give a detailed analysis of the phase formation of a CuNiSi alloy during oxidation and to identify the locus of failure for the interfacial delamination. The Cu leadframes were oxidized in an air oven at 240° C for up to 200 min exposures before encapsulation. A scanning acoustic microscope was used to locate delamination regions along the moulding compound/leadframe interface.

Type
Semiconductors
Copyright
Copyright © Microscopy Society of America

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References

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