Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-25T11:49:44.519Z Has data issue: false hasContentIssue false
  • English
  • Français

Control and in-situ imaging of heat & gas mediated processes in FIB/SEM system

Published online by Cambridge University Press:  01 August 2018

Libor Novak ,
Miroslav Kolibal ,
Min Wu ,
Petr Wandrol  and
Tomas Vystavel
Libor Novak
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Miroslav Kolibal
Affiliation:
Central European Institute of Technology - CEITEC, Purkynova 123, Brno, Czech Republic
Min Wu
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Petr Wandrol
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Tomas Vystavel
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 808 - 809
Copyright
© Microscopy Society of America 2018 

References

[1] Kolibal, M, et al, Nano Lett. 16(8 2016 4880–4886.Google Scholar
[2] Wang, Z-J, et al, ACS Nano 9(2 2015 1506–1519.Google Scholar
[3] Roediger, P, et al, J. Vac. Sci. Technol. B 27 2009 2711–2717.Google Scholar
[4] Mele, L, et al, Microsc. Res. Tech. 79 2016 239–250.Google Scholar
[5] Zhang, X, et al, Chem. Commun. 53 2017 13213–13216.Google Scholar
[6] Novak, L, et al, Microsc. Microanal. 22(Suppl. S3 2016 184–185.Google Scholar
[7] https://www.youtube.com/watch?v=sWbVsmYPYlI&feature=em-share_video_user.Google Scholar
[8] Peng, X, et al, Nanotechnology 16 2005 2389–2395.Google Scholar
[9] The authors acknowledge funding from Technology Agency of the Czech Republic, TE01020118.Google Scholar