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Contrast of Multilayed Structures in a Field Emission Gun Scanning Electron Microscope

Published online by Cambridge University Press:  24 July 2003

Sonia Duguey ,
Raynald Gauvin ,
Paula Horny  and
Thierry Wright
Sonia Duguey
Affiliation:
Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec, Canada, H3A 2B2
Raynald Gauvin
Affiliation:
Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec, Canada, H3A 2B2
Paula Horny
Affiliation:
Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec, Canada, H3A 2B2
Thierry Wright
Affiliation:
Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec, Canada, H3A 2B2

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 988 - 989
Copyright
Copyright © Microscopy Society of America 2003