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Comparison of the Defect Microstructure of Silicon Dioxide Thin Films and Buried Oxide Layers Determined Using Cathodoluminescence Microanalysis

Published online by Cambridge University Press:  03 August 2008

MA Stevens-Kalceff
MA Stevens-Kalceff
Affiliation:
University of New South Wales, Australia
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1112 - 1113
Copyright
© 2008 Microscopy Society of America

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