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Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope

Published online by Cambridge University Press:  23 September 2015

Michael T. Postek ,
John Villarrubia ,
Andras E. Vladar  and
Atsushi Muto
Michael T. Postek
Affiliation:
1-3.National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD 20899
John Villarrubia
Affiliation:
1-3.National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD 20899
Andras E. Vladar
Affiliation:
1-3.National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD 20899
Atsushi Muto
Affiliation:
4.Hitachi High Technologies America, Clarksburg, MD 20871

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1105 - 1106
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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