Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-26T01:27:33.835Z Has data issue: false hasContentIssue false
  • English
  • Français

Comparative Analysis of TEM and Atom Probe Tomography on GeSbTe Compositions in Phase Change Random Access Memory

Published online by Cambridge University Press:  23 November 2012

K. Hwang ,
J. Bae ,
K. Park ,
S. Jeon ,
J. Ahn ,
S. Kim ,
H. Jeong ,
S. Nam ,
G. Jeong  and
D. Jang
...Show all authors
K. Hwang
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
J. Bae
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
K. Park
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
S. Jeon
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
J. Ahn
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
S. Kim
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
H. Jeong
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
S. Nam
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
G. Jeong
Affiliation:
Semiconductor R&D center, Samsung Electronics, Hwasung-City, Republic of Korea
D. Jang
Affiliation:
POSTECH, Pohang, Republic of Korea
C. Park
Affiliation:
POSTECH, Pohang, Republic of Korea
Get access

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1796 - 1797
Copyright
Copyright © Microscopy Society of America 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)