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A Compact Vibration Reduced Set-up for Scanning nm-XRF and STXM.

Published online by Cambridge University Press:  10 August 2018

Janin Lubeck*
Affiliation:
Physikalisch-Technische Bundesanstalt, X-ray Spectrometry, Abbestr. 2-12, 10587Berlin, Germany
Christian Seim
Affiliation:
Physikalisch-Technische Bundesanstalt, X-ray Spectrometry, Abbestr. 2-12, 10587Berlin, Germany
Aurélie Dehlinger
Affiliation:
Technische Universitat Berlin, Institute for Optics and Atomic Physics, Hardenbergstr. 36, 10623Berlin, Germany
Andreas Haidl
Affiliation:
University of Applied Science Koblenz - RheinAhr Campus, Institute for X-optics, Joseph-Rovan-Allee 2, 53424Remagen, Germany
Philipp Hönicke
Affiliation:
Physikalisch-Technische Bundesanstalt, X-ray Spectrometry, Abbestr. 2-12, 10587Berlin, Germany
Yves Kayser
Affiliation:
Physikalisch-Technische Bundesanstalt, X-ray Spectrometry, Abbestr. 2-12, 10587Berlin, Germany
Rainer Unterumsberger
Affiliation:
Physikalisch-Technische Bundesanstalt, X-ray Spectrometry, Abbestr. 2-12, 10587Berlin, Germany
Claudia Fleischmann
Affiliation:
imec, Kapeldreef 75, 3001Leuven, Belgium
Burkhard Beckhoff
Affiliation:
Physikalisch-Technische Bundesanstalt, X-ray Spectrometry, Abbestr. 2-12, 10587Berlin, Germany
*
* Corresponding author, [email protected]

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Lubeck, J., et al, Review of Scientific Instruments 84(no. 4 2013 045106.CrossRefGoogle Scholar
[2] Lubeck, J., et al, AIP Conference Proceedings 1741(no. 1 2016 030011.CrossRefGoogle Scholar
[3] Sawhney, K.J.S., etal Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers. Detectors and Associated Equipment 390(no. 3 1997 395402.CrossRefGoogle Scholar