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A Compact Aberration Corrector for SEMs with Electrostatic-field formed by Annular and Circular Electrodes

Published online by Cambridge University Press:  05 August 2019

Tadahiro Kawasaki ,
Ryuji Yoshida ,
Takeharu Kato ,
Tsunenori Nomaguchi ,
Shunichi Motomura ,
Kenichi Nishinaka ,
Toshihide Agemura  and
Takashi Ikuta
Tadahiro Kawasaki
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Ryuji Yoshida
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Takeharu Kato
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Tsunenori Nomaguchi
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Shunichi Motomura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Kenichi Nishinaka
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Toshihide Agemura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Takashi Ikuta
Affiliation:
Faculty of Engineering, Osaka Electro-Communication University, Neyagawa, Japan

Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 502 - 503
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Kawasaki, T., et al. , Suf. Int. Anal, 48 (2015) 1160Google Scholar
[2]Kawasaki, T., et al. , PCT/JP2016/053691Google Scholar