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Check of the Performance of EDS Systems Attached to the SEM with the Test Material EDS-TM001/2 and Evaluation Software Package EDS Spectrometer Test -Application, Experiences and Updates

Published online by Cambridge University Press:  01 August 2018

Vasile-Dan Hodoroaba ,
Ralf Terborg  and
Mathias Procop
Vasile-Dan Hodoroaba
Affiliation:
Federal Institute for Materials Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, 12200 Berlin, Germany
Ralf Terborg
Affiliation:
Bruker Nano GmbH, Am Studio 2D, 12489 Berlin, Germany
Mathias Procop
Affiliation:
Federal Institute for Materials Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, 12200 Berlin, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 730 - 731
Copyright
© Microscopy Society of America 2018 

References

[1] www.webshop.bam.de (Product: Reference materials, Category: Test materials).Google Scholar
[2] Procop, M Hodoroaba, V-D Microsc Microanal 15(Suppl 2 2009) p. 1120.Google Scholar
[3] ISO 15632 (2012) “Microbeam Analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis”, ISO: Geneva.Google Scholar
[4] Hodoroaba, V-D Procop, M Microsc Microanal 20 2014) p. 1556.Google Scholar
[5] http://amptek.com/products/c-series-low-energy-x-ray-windows/#4.Google Scholar
[6] http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html.Google Scholar