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Characterization of Si in a W matrix Using Diffraction Contrast in the TEM

Published online by Cambridge University Press:  01 August 2002

B.I. Prenitzer ,
B.W. Kempshall ,
J.M. McKinley ,
W.H. Stinebaugh  and
I. Wylie
B.I. Prenitzer
Affiliation:
Agere Systems 9333 S. John Young Parkway, Orlando, FL 32819
B.W. Kempshall
Affiliation:
Mechanical, Materials and Aerospace Eng., University of Central Florida, Orlando, FL 32816
J.M. McKinley
Affiliation:
Agere Systems 9333 S. John Young Parkway, Orlando, FL 32819
W.H. Stinebaugh
Affiliation:
Agere Systems 600-700 Mountain Avenue, PO Box 636, Murray Hill, NJ 07974
I. Wylie
Affiliation:
Agere Systems 2 Oak Way, Berkeley Heights, NJ 07922

Abstract

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Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 790 - 791
Copyright
Copyright © Microscopy Society of America 2002