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Characterization of Nanoscale Lattice Strains in Si CMOS by Convergent Beam Electron Diffraction (CBED)

Published online by Cambridge University Press:  01 August 2005

J Huang ,
D K Cha ,
P R Chidambaram ,
R B Irwin ,
P J Jones  and
M J Kim
J Huang
Affiliation:
The University of Texas at Dallas
D K Cha
Affiliation:
The University of Texas at Dallas
P R Chidambaram
Affiliation:
Texas Instruments
R B Irwin
Affiliation:
Texas Instruments
P J Jones
Affiliation:
Texas Instruments
M J Kim
Affiliation:
The University of Texas at Dallas

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 2084 - 2085
Copyright
© 2005 Microscopy Society of America