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Characterization of Nanoindentations in Silicon by Cross-sectional TEM

Published online by Cambridge University Press:  01 August 2004

Songqing Wen ,
James Bentley ,
Jae-il Jang ,
Ian M. Anderson  and
George M. Pharr
Songqing Wen
Affiliation:
University of Tennessee
James Bentley
Affiliation:
Oak Ridge National Laboratory, Tennessee
Jae-il Jang
Affiliation:
University of Tennessee
Ian M. Anderson
Affiliation:
Oak Ridge National Laboratory, Tennessee
George M. Pharr
Affiliation:
University of Tennessee Oak Ridge National Laboratory, Tennessee
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 56 - 57
Copyright
© 2004 Microscopy Society of America

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