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Characterization of Ferroelectric Random Access Memory (FRAM) Storage Capacitors

Published online by Cambridge University Press:  30 July 2020

Sahar Hihath ,
Hannah Harter ,
Jerry Fortier  and
David Flowers
Sahar Hihath
Affiliation:
Defense Microelectronics Activity (DMEA), McClellan, California, United States
Hannah Harter
Affiliation:
Defense Microelectronics Activity (DMEA), McClellan, California, United States
Jerry Fortier
Affiliation:
Defense Microelectronics Activity (DMEA), McClellan, California, United States
David Flowers
Affiliation:
Defense Microelectronics Activity (DMEA), McClellan, California, United States

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1404 - 1405
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Copyright
Copyright © Microscopy Society of America 2020

References

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