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Characterization of Ceramics Using Electron Backscatter Diffraction in the SEM

Published online by Cambridge University Press:  02 July 2020

J.R. Michael
J.R. Michael*
Affiliation:
Materials Characterization Dept., Sandia National Laboratories, Albuquerque, NM87185-1405
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Extract

The technique of electron backscatter diffraction (EBSD) in the scanning electron microscope is becoming a standard technique for the characterization of materials. EBSD has evolved into a tool that can determine the orientation of a crystalline area of interest or the technique can be used for the identification of unknown phases from their composition and crystallography. The application of the technique to ceramic materials has demonstrated the many advantages of this technique over classical x-ray diffraction techniques or electron diffraction in the TEM.

EBSD patterns are obtained by illuminating a highly tilted sample (>45° from horizontal) with a stationary electron beam. Electrons that are backscattered from the sample may satisfy the condition for channeling (or diffraction) and produce images that contain bands of increased and decreased intensity that are equivalent to channeling patterns. The patterns are imaged by placing a phosphor screen near the sample and imaging the screen with either TV rate or a slow scan CCD camera.

Type
Future of Microscopy: Ceramics, Composites, and Cement
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 794 - 795
Copyright
Copyright © Microscopy Society of America

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References

Adams, B.L., et al., Met. Trans. A, 24A(1993)819.CrossRefGoogle Scholar
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The author gratefully acknowledges Carter, C.B.and Johnson, M.T. of the University of Minnesota for supplying the PLD samples. This work was supported by the United States Department of Energy under Contract DE-AC04- 94AL85000. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy.Google Scholar