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Characterization and Optimization of Semiconductor Specimen Preparation for QHREM

Published online by Cambridge University Press:  01 August 2002

N.Y. Jin-Phillipp ,
M. Kelsch ,
F. Phillipp  and
M. Rühle
N.Y. Jin-Phillipp
Affiliation:
Max-Planck-Institut für Metallforschung, Heisenbergstr.3, D-70569 Stuttgart, Germany
M. Kelsch
Affiliation:
Max-Planck-Institut für Metallforschung, Heisenbergstr.3, D-70569 Stuttgart, Germany
F. Phillipp
Affiliation:
Max-Planck-Institut für Metallforschung, Heisenbergstr.3, D-70569 Stuttgart, Germany
M. Rühle
Affiliation:
Max-Planck-Institut für Metallforschung, Heisenbergstr.3, D-70569 Stuttgart, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1204 - 1205
Copyright
Copyright © Microscopy Society of America 2002