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Channelplate Illumination Correction for Secondary Ion Mass Spectroscopy Images by Solving Apparatus Elasticity Equations

Published online by Cambridge University Press:  29 January 2003

Thomas C. Stubbings ,
Christoph Pollak  and
Herbert Hutter
Thomas C. Stubbings
Affiliation:
Institute for Analytical Chemistry, Vienna University of Technology, Getreidemarkt 9/151, Vienna 1060, Austria
Christoph Pollak
Affiliation:
Institute for Analytical Chemistry, Vienna University of Technology, Getreidemarkt 9/151, Vienna 1060, Austria
Herbert Hutter
Affiliation:
Institute for Analytical Chemistry, Vienna University of Technology, Getreidemarkt 9/151, Vienna 1060, Austria
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Abstract

Abstract: The SIMS channelplate used for recording image signals is characterized by local sensitivity differences caused by increasing aging of the central channelplate regions, which are subject to much more intense ion bombardment than the outer regions. These sensitivity differences lead to inhomogenous illumination of the sample, i.e., to images with disturbed intensity distributions. We present here a novel method to correct these illumination discrepancies by using the intensity changes due to sample position shifts to find the interfering background function that can be used to correct the original image. The proposed method has low presuppositions about the regarded images, and is stable with regard to noise and easy to apply. It is suitable not only for correction of channelplate local sensitivity differences but for all sorts of microscopic images that suffer from illumination inhomogeneity.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 5 , Issue 6 , November 1999 , pp. 407 - 412
Copyright
2001 Cambridge University Press

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