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Challenges in FIB TEM Sample Preparation: Damage Issues and Solutions

Published online by Cambridge University Press:  22 July 2022

Xiangli Zhong ,
Xiaorong Zhou ,
Sarah J Haigh ,
Philip J Withers  and
M. Grace Burke
Xiangli Zhong*
Affiliation:
Department of Materials, University of Manchester
Xiaorong Zhou
Affiliation:
Department of Materials, University of Manchester
Sarah J Haigh
Affiliation:
Department of Materials, University of Manchester
Philip J Withers
Affiliation:
Department of Materials, University of Manchester
M. Grace Burke
Affiliation:
Oak Ridge National Laboratory
*
*Corresponding author: [email protected]

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 60 - 62
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Copyright
Copyright © Microscopy Society of America 2022

References

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