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Challenges in Characterizations of MTJ Thin Film Stack for Spin-transfer Torque MRAM Device by Analytical TEM in Wafer-foundries

Published online by Cambridge University Press:  30 July 2020

Wayne Zhao ,
Hemant Dixit ,
Travis Mitchell  and
William Taylor
Wayne Zhao
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Hemant Dixit
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
Travis Mitchell
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States
William Taylor
Affiliation:
GLOBALFOUNDRIES US Inc., Malta, New York, United States

Abstract

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Type
Advances in Microscopy for Quantum Information Sciences
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2820 - 2821
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Copyright
Copyright © Microscopy Society of America 2020

References

Apalkov, D., et al. , Proceedings of the IEEE, 104-10, (2016), pp. 1796–1830.10.1109/JPROC.2016.2590142CrossRefGoogle Scholar
Naik, B., et al. International Electron Devices Meeting (IEDM), (2019), in-print.Google Scholar
Dixit, Hemant, et al. , IEEE International Magnetic Conference (INTERMAG), (2018), pp. 1–1.Google Scholar
Thanks to Frieder Baumann at Fab8 for inspiring discussions, and Management and Legal teams for supporting the publication clearance.Google Scholar